無塵室奈米粒子計數器CPC (Condensation Particle Counter)

 

 

 

 

 

無塵室中環境奈米粒徑(小於 0.1 um particle之粒徑)無法使用一般 particle counter 量測, TSI CPC 量測儀器滿足了環境中奈米粒徑的量測與監測.                                                                                        

 

 

 

 

ISO/DIS 14644-12 Standard                                                                    

 

 

 

 

Size Range: 10 nm – 1000 nm                                                                       

 

 

 

 

Particle Channel Size: Single channel                                                                     

 

 

 

 

Flow Rate: 0.1 CFM                                                     

 

 

 

Application:

 

            (1)無塵室環境及機台內環境奈米粒徑量測                       

                (2) Gas 管路內氣體奈米粒徑量測 (搭配TSI HPD) 

 

 

 

 

 

 

 

相關影片

 

 

 

https://www.youtube.com/watch?v=iNZMQW6qCe4&feature=youtu.be